Alternatives to NMP in semi-conductor manufacturing

Summary:

Alternatives to N-Methyl-2-Pyrrolidone (NMP) in semi-conductor manufacuring that do not include γ-Butyrolactone (GBL), Dimethyl Sulfoxide (DMSO), or Dimethylacetamide (DMAc).   Primary uses of NMP in semiconductor manufacturing include: * As a solvent in certain photolithography formulations, including photoresists.   * In Bottom Anti-Reflective Coatings (BARC) and polyimides *As a solvent pre-wet of wafers prior to application of spin on polymer * As a component of photoresist stripper formulations.


Description:

About Green Chemistry

Green chemistry is the design of chemical products and processes that reduce or eliminate the use and generation of hazardous substances. Green chemistry applies 12 fundamental principles across the life cycle of a chemical product, including its design, manufacture and use. Green chemistry is a critical element of sustainable chemistry, which seeks to reduce the environmental impact of processes and products, optimize the use of finite resources, minimize waste, and meet social needs. Sustainable chemistry is a key element of a broader business strategy for sustainability.

About the GC3

The Green Chemistry & Commerce Council (GC3) is a multi-stakeholder collaborative that drives the commercial adoption of green chemistry by catalyzing and guiding action across all industries, sectors and supply chains.  Started in 2003, the GC3 is a project of the Lowell Center for Sustainable Production at the University of Massachusetts, Lowell.  There are currently 130 members in the GC3, including large and small chemical manufacturers; consumer product companies/brands in many sectors; retailers; NGOs; consultants and government agencies.  Members participate in collaborative projects and convene at the GC3’s annual Innovators Roundtable.

Technology Needs from Large Strategics

This green chemistry technology need was provided by the GC3. The GC3 requests green chemistry technology needs — specific, green chemical, material and/or product technologies for which they are actively seeking new green chemistry solutions — from its member companies. This information is used to engage startups for the GC3 Technology Showcases and for collaborative innovation projects.


Alternative should replace:

N-Methyl-2-Pyrrolidone (NMP). Alternatives should not include γ-Butyrolactone (GBL), Dimethyl Sulfoxide (DMSO), or Dimethylacetamide (DMAc).


Green Chemistry & Commerce Council - GC3
Technical Function: Solvent
Sector of Use: SU16 - Manufacture of computer, electronic and optical products, electrical equipment

Company name: Green Chemistry & Commerce Council - GC3
Contact name: Julie Manley


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